![]() ![]() The Orion Version 4.3 software has several unique features that enhance integration with the process tool and process, including data binning, multi-event gas species-specific alarms, automatic recipe selection, and advanced SECS-II/GEM compatibility. The integrated control system mounts directly on the mass spectrometer and requires no additional electronics rack space. The Vacuum System Controller (VSC) for the integrated differential pumping system and the Compact Orion Controller are combined into a single on-board unit, which simplifies installation, provides higher reliability, and minimizes space requirements. introduces the Orion Compact Process Monitoring System with a closed ion source quadrupole mass spectrometer and integrated turbomolecular pump for in situ monitoring during physical vapor deposition (PVD). ![]()
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